Simulation of electron transport during electron-beam-induced deposition of nanostructures
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چکیده
منابع مشابه
Simulation of electron transport during electron-beam-induced deposition of nanostructures
We present a numerical investigation of energy and charge distributions during electron-beam-induced growth of tungsten nanostructures on SiO2 substrates by using a Monte Carlo simulation of the electron transport. This study gives a quantitative insight into the deposition of energy and charge in the substrate and in the already existing metallic nanostructures in the presence of the electron ...
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ژورنال
عنوان ژورنال: Beilstein Journal of Nanotechnology
سال: 2013
ISSN: 2190-4286
DOI: 10.3762/bjnano.4.89